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Standard

BS ISO 8181:2023

Atomic layer deposition. Vocabulary

Current

•

Published:

30 Nov 2023

Overview
Preview
References
History
Product Details
Descriptors
Atomic energy
Atomic structure
Nanomaterials
Nanoparticles
Inert gases
Exposure time
Vacuum apparatus
Vocabulary
ICS Codes
01.040.25 Manufacturing engineering (Vocabularies)
25.220.01 Surface treatment and coating in general
Committee
STI/33
International relationships
Identical to:

ISO 8181

ISBN
978 0 539 19026 7
Publisher
BSI