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ISO 8181:2023 | 16 Oct 2023 | BSI Knowledge
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ISO 8181:2023
Atomic layer deposition. Vocabulary
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Published:
16 Oct 2023
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Product Details
Descriptors
Atomic energy
Atomic structure
Nanomaterials
Nanoparticles
Inert gases
Exposure time
Vacuum apparatus
Vocabulary
ICS Codes
01.040.25 Manufacturing engineering (Vocabularies)
25.220.01 Surface treatment and coating in general
Committee
STI/33
International relationships
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ISBN
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Publisher
ISO