Introduction

Surface chemical analysis is an important area which involves interactions between people with different backgrounds and from different fields. Those conducting surface chemical analysis might be materials scientists, chemists, or physicists and might have a background that is primarily experimental or primarily theoretical. Those making use of the surface chemical data extend beyond this group into other disciplines.

With the present techniques of surface chemical analysis, compositional information is obtained for regions close to a surface (generally within 20 nm) and composition-versus-depth information is obtained with surface analytical techniques as surface layers are removed. The terms covered in this document relate to scanning probe microscopy. The surface analytical terms covered in ISO 18115‑1 extend from the techniques of electron spectroscopy and mass spectrometry to optical spectrometry and X-ray analysis. Concepts for these techniques derive from disciplines as widely ranging as nuclear physics and radiation science to physical chemistry and optics.

The wide range of disciplines and the individualities of national usages have led to different meanings being attributed to particular terms and, again, different terms being used to describe the same concept. To avoid the consequent misunderstandings and to facilitate the exchange of information, it is essential to clarify the concepts, to establish the correct terms for use, and to establish their definitions.

The terms are given in alphabetical order, classified under the following:

— Clause 3: Definitions of the scanning probe microscopy methods;
— Clause 4: Acronyms and terms for contact mechanics models;
— Clause 5: Definitions of terms for scanning probe methods;
— Clause 6: Definitions of supplementary scanning probe microscopy methods;
— Clause 7: Definitions of supplementary terms for scanning probe methods.

In the terms in Clause 3, note that the final “M” or final “S” in the acronyms, given as “microscopy” or “spectroscopy”, may also mean “microscope” or “spectrometer”, respectively, depending on the context. For the definition relating to the microscope or spectrometer, replace the words “a method” by the words “an instrument” where that appears.

In contact mechanics, covered in Clause 4, the basic theories are often referenced by acronyms. To avoid confusion, these acronyms are defined below. These models all assume that the materials in contact are homogeneous and isotropic, and have a linear elastic constitutive behaviour. Various contact models for inhomogeneous, anisotropic, nonlinear, viscoelastic, elastoplastic, and other materials have been derived and can be found in the literature.

Many terms concerned with profilometry, or more correctly, surface texture measuring instruments, may be found in ISO 3274 and ISO 4287. ISO 3274 specifies the properties of the instrument that influence profile evaluation and provides basic considerations of the specification of contact (stylus) instruments (profile meter and profile recorder) whereas ISO 4287 concerns some issues involving surface texture.

Those interested in a more detailed understanding of profilometry or surface texture measuring instruments should consult ISO 3274, ISO 4287, ISO 25178 and other referenced documents.

BS ISO 18115-2:2021

Surface chemical analysis. Vocabulary - Terms used in scanning-probe microscopy

Current

Published:

31 Jan 2022