Introduction

Surface chemical analysis is an important area which involves interactions between people with different backgrounds and from different fields. Those conducting surface chemical analysis can be materials scientists, chemists, or physicists and can have a background that is primarily experimental or primarily theoretical. Those making use of the surface chemical data extend beyond this group into other disciplines.

With the present techniques of surface chemical analysis, compositional information is obtained for regions close to a surface (generally within 20 nm) and composition-versus-depth information is obtained with surface analytical techniques as surface layers are removed. The surface analytical terms covered in this document extend from the techniques of electron spectroscopy and mass spectrometry to optical spectrometry and X-ray analysis. The terms covered in ISO 18115‑2 relate to scanning-probe microscopy. The terms covered in ISO 18115‑3 relate to optical interface analysis. Concepts for these techniques derive from disciplines as widely ranging as nuclear physics and radiation science to physical chemistry and optics.

The wide range of disciplines and the individualities of national usages have led to different meanings being attributed to particular terms and, again, different terms being used to describe the same concept. To avoid the consequent misunderstandings and to facilitate the exchange of information, it is essential to clarify the concepts, to establish the correct terms for use, and to establish their definitions.

The terms are classified under Clauses 3 to 22:

— Clause 3: Terms related to general concepts in surface chemical analysis;
— Clause 4: Terms related to particle transport in materials;
— Clause 5: Terms related to the description of samples;
— Clause 6: Terms related to sample preparation;
— Clause 7: Terms related to instrumentation;
— Clause 8: Terms related to experimental conditions;
— Clause 9: Terms related to sputter depth profiling;
— Clause 10: Terms related to resolution;
— Clause 11: Terms related to electron spectroscopy methods;
— Clause 12: Terms related to electron spectroscopy analysis;
— Clause 13: Terms related to X-ray fluorescence, reflection and scattering methods;
— Clause 14: Terms related to X-ray fluorescence, reflection and scattering analysis;
— Clause 15: Terms related to glow discharge methods;
— Clause 16: Terms related to glow discharge analysis;
— Clause 17: Terms related to ion scattering methods;
— Clause 18: Terms related to ion scattering analysis;
— Clause 19: Terms related to surface mass spectrometry methods;
— Clause 20: Terms related to surface mass spectrometry analysis;
— Clause 21: Terms related to atom probe tomography;
— Clause 22: Terms related to multivariate analysis.

BS ISO 18115-1:2023

Surface chemical analysis. Vocabulary - General terms and terms used in spectroscopy

Current

Published:

30 Jun 2023