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ISO 13083:2015 | 20 Aug 2015 | BSI Knowledge
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ISO 13083:2015
Surface chemical analysis. Scanning probe microscopy. Standards on the definition and calibration of spatial resolution of electrical scanning probe microscopes (ESPMs) such as SSRM and SCM for 2D-dopant imaging and other purposes
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Published:
20 Aug 2015
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Product Details
Descriptors
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ICS Codes
71.040.40 Chemical analysis
Committee
CII/60
International relationships
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ISBN
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Publisher
ISO