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BS ISO 13083:2015 | 31 Aug 2015 | BSI Knowledge
Standard
BS ISO 13083:2015
Surface chemical analysis. Scanning probe microscopy. Standards on the definition and calibration of spatial resolution of electrical scanning probe microscopes (ESPMs) such as SSRM and SCM for 2D-dopant imaging and other purposes
Current
•
Published:
31 Aug 2015
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Product Details
Descriptors
Surface properties
Surfaces
Sampling methods
Microscopes
Data representation
Chemical analysis and testing
Calibration
Surface chemistry
ICS Codes
71.040.40 Chemical analysis
Committee
CII/60
International relationships
Identical to:
ISO 13083:2015
ISBN
978 0 580 67751 9
Publisher
BSI