ISO 14707 provides guidelines that are applicable to bulk and depth profiling GD-OES analyses. The guidelines discussed herein are limited to the analysis of rigid solids.
ISO 14707 combined with specific standard methods which are available now and, in the future, these guidelines are intended to enable the regulation of instruments and the control of measuring conditions.
Although several types of glow discharge optical emission sources have been developed over the years, the Grimm type with a hollow anode account for an exceptionally large majority of glow discharge optical emission devices currently in use both for dc and rf sources.
ISO 14707 contained guidelines that are equally applicable to both and other source designs and the Grimm type source is used only as an example.
Note: ISO 14707 does not cover the analysis of powders, gases, or solutions.
ISO 14707 on glow discharge optical emission spectrometry (GD-OES) is applicable for:
Glow discharge optical emission spectrometry (GD-OES), is used to determine the elemental composition of solid samples. GD-OES to be used for either bulk or depth profile analysis. In bulk analysis, changes in elemental composition with depth into the specimen are assumed to be negligible.
ISO 14707 main goal of depth profile analysis is usually to gain information concerning such changes of composition. Layer thicknesses amenable to GD-OES depth profiling range from a few nanometres to approximately one hundred micrometers.
As is true for any instrumental analysis method, the quality of a GD-OES analysis depends markedly on the correct optimization and operation of the instrumentation. ISO 14707 provides guidelines of practice that are to be followed to ensure that GD-OES analyses are of the highest possible quality.
ISO 14707:2021