PD ISO/TR 19319:2013 | 31 Mar 2013 | BSI Knowledge
Publication
PD ISO/TR 19319:2013
Surface chemical analysis. Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods
Current
•
Published:
1 Scope
This Technical Report describes:
a) Functions and their relevance to lateral resolution:
1)Point spread function (PSF) — see 4.1.1
2)Line spread function (LSF) — see 4.1.2
3)Edge spread function (ESF) — see 4.1.3
4)Modulation transfer function (MTF) — see 4.1.4
5)Contrast transfer function (CTF) — see 4.1.5.
b) Experimental methods for the determination of lateral resolution and parameters related to lateral resolution:
1) Imaging of a narrow stripe — see 4.2
2) Imaging of a sharp edge — see 4.3
3) Imaging of square-wave gratings — see 4.4.
c) Physical factors affecting lateral resolution, analysis area and sample area viewed by the analyser in Auger electron spectroscopy and X-ray photoelectron spectroscopy — see Clauses 5 and 6.