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BS ISO 14706:2000 | 15 May 2001 | BSI Knowledge
Standard
Withdrawn
BS ISO 14706:2000
Surface chemical analysis. Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy
Published:
15 May 2001
•
Withdrawn:
31 Jul 2014
Overview
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References
History
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Product Details
Descriptors
Surface chemistry
Reflection
Epitaxial layers
Contamination
Substrates (insulating)
X-ray analysis
Fluorimetry
Density
X-ray fluorescence spectrometry
Surface properties
Atoms
Silicon
Surfaces
Surfactants
Chemical analysis and testing
Contaminants
ICS Codes
71.040.40 Chemical analysis
Committee
CII/60
International relationships
Identical to:
ISO 14706:2000
ISBN
0 580 37252 9
Publisher
BSI