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ISO 18516:2019 | 14 Jan 2019 | BSI Knowledge
Standard
ISO 18516:2019
Surface chemical analysis. Determination of lateral resolution and sharpness in beam based methods with a range from nanometres to micrometres
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Published:
14 Jan 2019
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Product Details
Descriptors
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ICS Codes
71.040.40 Chemical analysis
Committee
CII/60
International relationships
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ISBN
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Publisher
ISO