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ISO 17109:2022 | 21 Mar 2022 | BSI Knowledge
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ISO 17109:2022
Surface chemical analysis. Depth profiling. Method for sputter rate determination in X-ray photoelectron spectroscopy, Auger electron spectroscopy and secondary-ion mass spectrometry sputter depth profiling using single and multi-layer thin films
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Published:
21 Mar 2022
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Product Details
Descriptors
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ICS Codes
71.040.40 Chemical analysis
Committee
CII/60
International relationships
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ISBN
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Publisher
ISO