Standard

BS ISO 17331:2004+A1:2010

Surface chemical analysis. Chemical methods for the collection of elements from the surface of silicon-wafer working reference materials and their determination by total-reflection X-ray fluorescence (TXRF) spectroscopy

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Product Details

Descriptors

Chemical analysis and testing

Surface chemistry

Silicon

Iron

X-ray fluorescence spectrometry

Control samples

Decomposition reactions

Fluorimetry

Spectrophotometry

Substrates (insulating)

Nickel

Spectroscopy

ICS Codes

71.040.40 Chemical analysis

Committee

CII/60

International relationships

Identical to:

ISO 17331:2004/AMD 1:2010

ISBN

978 0 580 64479 5

Publisher

BSI