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ASTM F1238 - 95(2011) | 6 Jan 2011 | BSI Knowledge
Standard
Withdrawn
ASTM F1238 - 95(2011)
Standard Specification for Refractory Silicide Sputtering Targets for Microelectronic Applications
Published:
6 Jan 2011
•
Withdrawn:
16 Jan 2020
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Product Details
Descriptors
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ICS Codes
31.100 Electronic tubes
Committee
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International relationships
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ISBN
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Publisher
ASTM