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ASTM F3166 - 16 | 1 May 2016 | BSI Knowledge
Standard
Withdrawn
ASTM F3166 - 16
Standard Specification for High-Purity Titanium Sputtering Target Used for Through-Silicon Vias (TSV) Metallization
Published:
1 May 2016
•
Withdrawn:
6 Dec 2023
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Product Details
Descriptors
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ICS Codes
25.220.40 Metallic coatings
31.120 Electronic display devices
Committee
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International relationships
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ISBN
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Publisher
ASTM