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ASTM F2113 - 01(2011) | 6 Jan 2011 | BSI Knowledge
Standard
Withdrawn
ASTM F2113 - 01(2011)
Standard Guide for Analysis and Reporting the Impurity Content and Grade of High Purity Metallic Sputtering Targets for Electronic Thin Film Applications
Published:
6 Jan 2011
•
Withdrawn:
16 Jan 2020
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Product Details
Descriptors
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ICS Codes
29.045 Semiconducting materials
Committee
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International relationships
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ISBN
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Publisher
ASTM