BS EN 62276 is an international standard that discusses single crystal wafers for surface acoustic wave (SAW) device applications, enabling visual inspection, high transmission and optical clarity in manufacturing processes.
BS EN 62276 applies to the manufacture of synthetic quartz, lithium niobate (LN), lithium tantalate (LT), lithium tetraborate (LBO), and lanthanum gallium silicate (LGS) single crystal wafers intended for use as substrates in the manufacture of surface acoustic wave (SAW) filters and resonators.
BS EN 62276 on single crystal wafers for surface acoustic wave (SAW) device applications is useful for:
A variety of piezoelectric materials are used for surface acoustic wave (SAW) filter and resonator applications. Earlier, wafer specifications were usually negotiated between users and suppliers. BS EN 62276 was prepared to provide industry-standard technical specifications for manufacturing piezoelectric single-crystal wafers to be used in surface acoustic wave devices.
Visual inspections for front surface inspection method defined in BS EN 62276 in order to avoid bias and accurately gauge the number of defects present in a given sample population, wafers to inspected are chosen at random and with consistent sampling frequency.
The guidance in BS EN 62276 helps users to avoid contamination or damage during shipping or storage and to prevent stray ambient light from interfering with the inspector’s ability to clearly see the surface.
BS EN 62276:2016 supersedes BS EN 62276:2013 which is withdrawn. BS EN 62276:2016 includes some technical changes with respect to BS EN 62276:2013. These include:
EN 60335-2-3:2002/A11:2010
EN 62276:2016
IEC 62276:2016