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BS IEC 63068-4:2022 | 30 Sep 2022 | BSI Knowledge
Standard
BS IEC 63068-4:2022
Semiconductor devices. Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices - Procedure for identifying and evaluating defects using a combined method of optical inspection and photoluminescence
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Published:
30 Sep 2022
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Product Details
Descriptors
Semiconductor devices
Silicon carbide
Defects
Inspection
Evaluation
ICS Codes
31.080.99 Other semiconductor devices
Committee
EPL/47
International relationships
Identical to:
EN 63068-4 Ed.1.0
IEC 63068-4 Ed.1.0
ISBN
978 0 539 18417 4
Publisher
BSI