MEMS resonators are small electromechanical structures that vibrate at high frequencies. They are used for timing references, signal filtering, mass sensing, biological sensing, motion sensing, and other diverse applications.
BS IEC 62047‑32 is part of the IEC 62047 series on semiconductor devices. BS IEC 62047‑32 specifies the test method and test condition for the nonlinear vibration of MEMS resonators. The statements made in BS IEC 62047‑32 apply to the development and manufacture for MEMS resonators.
BS IEC 62047‑32 on MEMS resonators testing is useful for:
BS IEC 62047‑32 guidelines help you with the testing the MEMS resonators that you design and manufacture. BS IEC 62047‑32 specifies the test method and test procedures for nonlinear vibration of MEMS resonators for:
BS IEC 62047‑32 guidelines are a step towards ensuring that your customers have access to high-quality MEMS resonators.
IEC 62047-32:2019