BS EN 62047-21 is the 21st part of an international standard used for semiconductor devices.
BS EN 62047-21 specifies the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 μm.
BS EN 62047-21 on Semiconductor devices is useful for:
Micro-electromechanical system (MEMS) is a process technology that is useful in creating tiny integrated devices or systems. These devices are useful in combining mechanical and electrical components.
BS EN 62047-21 specifies the test methods, test apparatus, and test procedure for Poisson’s ratio of thin film MEMS materials. This test method is useful in measuring the Poisson ratio by applying air pressure to the test piece. With the help of BS EN 62047-21, you can also measure the deflections of both membranes used in MSME devices.
By applying BS EN 62047-21 you can endure the quality of thin-film MEMS material used in these devices that results in manufacturing better quality micro-electromechanical devices.
EN 62047-21:2014
IEC 62047-21:2014