BS EN 62047-1 is the first part of an international standard covering terms and definitions that enables standardization of terms, definitions and language related to micro-electromechanical devices.
BS EN 62047-1 defines terms for micro-electromechanical devices including the process of production of such devices.
BS EN 62047-1 on semiconductor devices useful for:
Micro-electromechanical systems (MEMS) is a technology useful in creating integrated devices or systems that are combined with mechanical and electrical properties. They are micro-sized devices, in which sensors, actuators, transducers, resonators, oscillators, mechanical components and/or electric circuits are integrated.
BS EN 62047‑1 provides users with a mutual and consistent understanding and use of uniform terms in processes and frameworks dealing with the management of risk.
BS EN 62047‑1 provides users guidance on terms and definitions relating to science and engineering, materials science, functional element, machining technology, bonding, assembling, measurement, and application technology that facilitates effective communication across all value chains.
Guidance in BS EN 62047-1 enables users to standardize common technical terms used in MEMS for semiconductor devices that is compiled for proper understanding to accurately understand relevant text, correspondences and communication.
BS EN 62047-1:2016 supersedes BS EN 62047-1:2006, which is withdrawn. BS EN 62047-1:2016 includes some technical changes with respect to BS EN 62047-1:2006. These include:
EN 61988-2-3:2009
EN 62047-1:2016
IEC 61988-2-3:2009
IEC 62047-1:2016