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BS IEC 62047-46:2025

Semiconductor devices. Micro-electromechanical devices - Silicon based MEMS fabrication technology. Measurement method of tensile strength of nanoscale thickness membrane

Current

•

Published:

30 Apr 2025

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Product Details
Descriptors
Semiconductor technology
Silicon
Measurement
Tensile strength
Membrane switches
Thickness
ICS Codes
31.080.99 Other semiconductor devices
Committee
EPL/47
International relationships
Identical to:

IEC 62047-46 Ed.1.0

ISBN
978 0 539 21850 3
Publisher
BSI