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BS IEC 62047-45:2025

Semiconductor devices. Micro-electromechanical devices - Silicon based MEMS fabrication technology. Measurement method of impact resistance of nanostructures

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•

Published:

31 Mar 2025

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Product Details
Descriptors
Semiconductor technology
Semiconductor devices
Electromechanical devices
Silicon
Measurement
Nanotechnology
Structures
ICS Codes
31.080.99 Other semiconductor devices
Committee
EPL/47
International relationships
Identical to:

IEC 62047-45 Ed.1.0

ISBN
978 0 539 21849 7
Publisher
BSI