BS IEC 62047 is an international standard that discusses semiconductor devices including microelectromechanical devices. The main aim of the IEC 62047 series is to provide entities involved with semiconductor technology with best industry techniques to demonstrate the reliability and performance of their devices and components.
BS IEC 62047‑28 is the 28th part of the multi-series that discusses semiconductor devices which performance testing method of vibration-driven MEMS electret energy harvesting.
BS IEC 62047‑28 specifies terms and definitions, and a performance testing method of vibration-driven MEMS electret energy harvesting devices to determine the characteristic parameters for consumer, industry, or any application.
BS IEC 62047‑28 applies to vibration-driven electret energy harvesting devices whose electrodes with a gap below 1 000 μm are covered by dielectric material with trapped charges and are fabricated by MEMS processes such as etching, photolithography, or deposition.
BS IEC 62047‑28 on semiconductor devices is useful for:
Electret-based microelectromechanical system (MEMS) vibratory energy harvesting is a key technology for converting the mechanical energy of environmental vibrations into electricity. If their potential is realised, the need of batteries to power components can be done away with.
BS IEC 62047‑28 provides guidance on vibration testing equipment that provides fundamental configurations consisting of functional blocks or components for vibration testing equipment for MEMS electrets energy harvesting devices at a specified constant frequency and constant acceleration. Guidance on measuring vibration acceleration response, vibration frequency response and the conditions and electric characteristics of the external load are also covered in BS IEC 62047‑28.
The vibration-driven MEMS energy harvesting devices for testing defined in BS IEC 62047-28 indicates the manner of mounting and vibration direction.
As a result, you can efficiently retrieve the power from vibrations by BS IEC 62047-28-compliant MEMS energy harvesters.
IEC 62047-28:2017