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BS IEC 62047-52:2026 | 31 Mar 2026 | BSI Knowledge
Standard
BS IEC 62047-52:2026
Semiconductor devices - Micro-electromechanical devices - Part 52: Biaxial tensile testing method for stretchable MEMS
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•
Published:
31 Mar 2026
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Product Details
Descriptors
Semiconductor manufacture
Semiconductor materials
Semiconductor technology
Electronic equipment and components
Semiconductor devices
Tensile testing equipment
Tensile testing
ICS Codes
31.080.99 Other semiconductor devices
Committee
EPL/47
International relationships
Identical to:
IEC 62047-52:2026
ISBN
978 0 539 33390 9
Publisher
BSI