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IEC 62047-4:2026 | 7 Jan 2026 | BSI Knowledge
Standard
IEC 62047-4:2026
Semiconductor devices. Micro-electromechanical devices. - Part 4: Generic specification for MEMS
Current
•
Published:
7 Jan 2026
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Product Details
Descriptors
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ICS Codes
31.080.99 Other semiconductor devices
Committee
EPL/47
International relationships
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ISBN
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Publisher
IEC