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Standard
BS IEC 62047-53:2025
Semiconductor devices. Micro-electromechanical devices - MEMS electrothermal transfer device
Current
•
Published:
31 Oct 2025
Overview
Preview
References
History
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Product Details
Descriptors
Semiconductor manufacture
Semiconductor materials
Semiconductor technology
Electronic equipment and components
Semiconductor devices
ICS Codes
31.080.99 Other semiconductor devices
Committee
EPL/47
International relationships
Identical to:
IEC 62047-53:2025
ISBN
978 0 539 33389 3
Publisher
BSI
BS IEC 62047-53:2025 | 31 Oct 2025 | BSI Knowledge