BS EN 62047-4 is the fourth part of the multi-series used for Semiconductor devices.
BS EN 62047-4 describes generic specifications for micro-electromechanical systems (MEMS) made by semiconductors, which are the basis for specifications given in other parts of this series for various types of MEMS applications such as sensors, RF MEMS, excluding optical MEMS, bio MEMS, micro TAS, and power MEMS. This standard specifies general procedures for quality assessment to be used in IECQ-CECC systems and establishes general principles for describing and testing electrical, optical, mechanical and environmental characteristics.
BS EN 62047-4 aids in the preparation of standards that define devices and systems made by micromachining technology, including but not limited to, material characterization and handling, assembly and testing, process control, and measuring methods. MEMS described in this standard are basically made of semiconductor material. However, the statements made in this standard are also applicable to MEMS using materials other than semiconductor, for example, polymers, glass, metals, and ceramic materials.
BS EN 62047-4 on Semiconductor devices is useful for:
Micro-electromechanical systems (MEMS) are a process technology that is useful in creating tiny integrated devices or systems. These devices are useful in combining mechanical and electrical components.
BS EN 62047-4 specifies the test method and test procedure for micro-electromechanical systems used in semiconductor devices. This helps in determining the material characteristics of the micro-electromechanical systems. With the help of this endurance test, you can identify the failures in these MEMS systems.
By applying BS EN 62047-4, you can ensure the sustainability of these microelectromechanical systems (MEMS) in different climatic conditions. This helps in manufacturing good quality micro-electromechanical systems (MEMS).
EN 62047-4:2010
IEC 62047-4:2008