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IEC 62047-37:2020 | 28 Apr 2020 | BSI Knowledge
Standard
IEC 62047-37:2020
Semiconductor devices. Micro-electromechanical devices - Environmental test methods of MEMS piezoelectric thin films for sensor application
Current
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Published:
28 Apr 2020
Overview
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References
History
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Product Details
Descriptors
Durability
Sensors
Thin films
Test methods
Semiconductor devices
Electromechanical storage
Environmental testing
Piezoelectric devices
ICS Codes
31.080.01 Semiconductor devices in general
31.080.99 Other semiconductor devices
31.140 Piezoelectric devices
Committee
EPL/47
International relationships
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ISBN
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Publisher
IEC