BS EN 62047-26:2016

What is BS EN 62047-26 - Description and measurement methods for micro trench and needle structures about?   

BS EN 62047-26 is the 26th part of an international standard used for semiconductor devices. This test method helps in measuring the interfacial adhesion energy in microelectromechanical devices.   

BS EN 62047-26 specifies descriptions of trench structure and needle structure on a micrometer scale. In addition, it provides examples of measurement for the geometry of both structures. 

For trench structures, BS EN 62047-26 applies to structures with a depth of 1 μm to 100 μm; walls and trenches with respective widths of 5 μm to 150 μm; and aspect ratio of 0.0067 to 20. 

For needle structures, BS EN 62047-26 applies to structures with three or four faces with a height, horizontal width, and vertical width of 2 μm or larger, and with dimensions that fit inside a cube with sides of 100 μm. 

Note: BS EN 62047-26 is applicable to the structural design of MEMS and geometrical evaluation after MEMS processes. 

Who is BS EN 62047-26 - Description and measurement methods for micro trench and needle structures for?  

BS EN 62047-26 on semiconductor devices useful for:  

• Semiconductor foundries  
• Manufacturers of electronic devices  
• Manufacturers of automobiles  
• Electrical engineers   

Why should you use BS EN 62047-26 - Description and measurement methods for micro trench and needle structures?   

Micro-electromechanical systems are a technology useful in creating integrated devices or systems that are combined with mechanical and electrical properties. Trench structures are one or more rectangular structures engraved in a planar substrate, with a constant trapezoidal cross-section profile. Needle structures are projecting structures with a pointed tip formed of three or more faces, formed on a planar substrate with the plane of symmetry in the vertical plane. 

BS EN 62047‑26 specifies the method of indicating the cross-sectional geometry of trench structures with micrometer scale dimensions is a diagram of the cross-section required for indicating the cross-sectional geometry of trench structures in BS EN 62047‑26. 

BS EN 62047‑26 specifies the method of indicating the geometry of needle structures in a micrometer scale. The needle structures defined in BS EN 62047‑26 are projecting structures with a pointed tip formed of three or four faces, formed on a planar substrate with the plane of symmetry in the vertical plane. 

BS EN 62047‑26 will assist you in: 

• Record the temperature, humidity, and necessary measurement conditions for each measurement 
• Perform measurement within the dimensional scale guaranteed in the instrument used for each measurement 
• Maintain the levelness and perpendicularity of the sample when set in the instrument within the range guaranteed in the instrument 
• Specify the method of straight-line approximation and curve approximation required for indicating the geometry of trench structures 

With obedience and compliance of BS EN 62047‑26, users can standardize the structural design of micro trench and needle structures in micro-electromechanical devices.