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Standard
BS EN 62047-26:2016
Semiconductor devices. Micro-electromechanical devices - Description and measurement methods for micro trench and needle structures
Current, Under Review
•
Published:
31 May 2016
Overview
Preview
References
History
Product Details
Descriptors
Thin films
Semiconductor devices
Test equipment
Electronic equipment and components
Test specimens
Integrated circuits
Tensile testing
Semiconductor technology
Electromechanical devices
ICS Codes
31.080.99 Other semiconductor devices
Committee
EPL/47
International relationships
Identical to:
EN 60793-2-30:2009
EN 62047-26:2016
IEC 62047-26:2016
ISBN
978 0 580 85309 8
Publisher
BSI