ISO 16700 specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using appropriate reference material.
This method is limited to magnifications determined by the available size range of structures in the calibrating reference material.
ISO 16700 does not apply to the dedicated critical dimension measurement SEM.
ISO 16700 on guidelines for calibrating image magnification is useful for:
The scanning electron microscope is widely used to investigate the surface structure of a range of important materials such as semiconductors, metals, polymers, glass, food, and biological materials, and ISO 16700 is relevant to the need for magnification calibration of the images.
ISO 16700 describes the requirements for calibration of the image magnification in the scanning electron microscope using reference material or certified reference material.
The selection of the CRM depends on the magnification being used and the accuracy required. For the purposes of ISO 16700, ensure that the accuracy of calibration is better than 10 %.
The calibration report carried out by the laboratory shall be accurate, clear, unambiguous, and in accordance with the specific instructions in the calibration methods listed in ISO 16700.
ISO 16700:2016