What is ISO 16700 - Guidelines for calibrating image magnification about?

ISO 16700 specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using appropriate reference material.

This method is limited to magnifications determined by the available size range of structures in the calibrating reference material.

ISO 16700 does not apply to the dedicated critical dimension measurement SEM.

Who is ISO 16700 - Guidelines for calibrating image magnification for?

ISO 16700 on guidelines for calibrating image magnification is useful for:

Microscopic practitioners
Microscope manufacturers
Microscope researchers
Biologists
Image magnification quality analyst

Why should you use ISO 16700 - Guidelines for calibrating image magnification?

The scanning electron microscope is widely used to investigate the surface structure of a range of important materials such as semiconductors, metals, polymers, glass, food, and biological materials, and ISO 16700 is relevant to the need for magnification calibration of the images.

ISO 16700 describes the requirements for calibration of the image magnification in the scanning electron microscope using reference material or certified reference material.

The selection of the CRM depends on the magnification being used and the accuracy required. For the purposes of ISO 16700, ensure that the accuracy of calibration is better than 10 %.

The calibration report carried out by the laboratory shall be accurate, clear, unambiguous, and in accordance with the specific instructions in the calibration methods listed in ISO 16700.

BS ISO 16700:2016

Microbeam analysis. Scanning electron microscopy. Guidelines for calibrating image magnification

Current, Under Review

Published:

31 Jul 2016