ISO 23420 discusses microbeam Analysis. ISO 23420 specifies a determination procedure of energy resolution in the scanning transmission electron microscope, or the transmission electron microscope equipped with the electron energy loss (EEL) spectrometer.
Note: ISO 23420 is applicable to both in-column type EEL spectrometer and post-column type EEL spectrometer. These EEL signal detecting systems are applicable to a parallel detecting system and a serial detecting system.
ISO 23420 on energy resolution for electron energy loss spectrum analysis is applicable to:
ISO 23420 to understand the chemical composition, the atomic bonding, and the electronic structure, electron energy loss analysis is often performed with the scanning transmission electron microscope, or the transmission electron microscope (S/TEM) equipped with the electron energy loss (EEL) spectrometer.
In the analysis using the EEL spectrometer system, the energy loss of incident electrons by the inelastic interaction via phonon and plasmon excitations, intra- and inter-band transitions and the inner shell ionization can be measured. The inner shell ionization is particularly useful and important as it gives information on the chemical composition of materials.
ISO 23420 provides precise analysis based on the energy loss peak decomposition which is vitally important to understand the energy resolution of the EEL spectrometer system.
ISO 23420 provides the procedures for energy step calibration and energy resolution determination useful for the electron energy loss spectrum analysis in the S/TEM equipped with the EEL spectrometer.
ISO 23420