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BS EN ISO 25178-603:2013 | 31 Oct 2013 | BSI Knowledge
Standard
Withdrawn
BS EN ISO 25178-603:2013
Geometrical product specifications (GPS). Surface texture: Areal - Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments
Published:
31 Oct 2013
•
Withdrawn:
28 Feb 2025
Overview
Preview
References
History
1 Scope
This part of ISO 25178 describes the
metrological characteristics
of phase-shifting interferometric (
PSI
) profile and areal surface texture measuring microscopes.
Product Details
Descriptors
Surface-roughness measurement
Profile
Area
Surface properties
Roughness (surface)
Geometry
Profile measurement
Geometric surfaces
Surface texture
ICS Codes
17.040.20 Properties of surfaces
17.040.40 Geometrical Product Specification (GPS)
Committee
TPR/1
International relationships
Identical to:
EN ISO 25178-603:2013
ISO 25178-603:2013
ISBN
978 0 580 82360 2
Publisher
BSI