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ISO 21859:2019 | 18 Jun 2019 | BSI Knowledge
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ISO 21859:2019
Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for plasma resistance of ceramic components in semiconductor manufacturing equipment
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Published:
18 Jun 2019
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Product Details
Descriptors
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ICS Codes
81.060.30 Advanced ceramics
Committee
RPI/13
International relationships
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ISBN
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Publisher
ISO