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26/30510433 DC | 9 Jan 2026 | BSI Knowledge
Standard
26/30510433 DC
Draft BS EN 62047-54 Ed.1.0 Micro-electromechanical devices - Part 54: Silicon based MEMS fabrication technology - Test method of microstructure tensile
Current
•
Published:
9 Jan 2026
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Product Details
Descriptors
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ICS Codes
31.080.01 Semiconductor devices in general
Committee
EPL/47
International relationships
Identical to:
EN 62047-54 Ed.1.0
IEC 62047-54 Ed.1.0
ISBN
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Publisher
BSI