ISO 7870‑7 is part seven of a multi-series standard that covers multivariate control charts for process optimization by routinely monitoring many tool process parameters with fewer charts.
ISO 7870‑7 describes the construction and use of multivariate control charts in statistical process control (SPC) and establishes methods for using and understanding this generalized approach to control charts where the characteristics being measured are from variables data.
Note 1: ISO 7870‑7 describes the current state of the art of multivariate control charts that are being applied in practice nowadays.
Note 2: ISO 7870‑7 does not cover the use of principal component analysis (PCA) and partial least squares (PLS) in field of multivariate statistical process control.
ISO 7870‑7 on multivariate control chart is useful for:
Univariate charts can give misleading results when the characteristics are highly correlated. Process monitoring of problems in which several related variables are of interest is collectively known as multivariate statistical process control (MSPC). It enables you to routinely monitor many tool process parameters fewer charts.
ISO 7870‑7 provides you a calculation method for capability statistics for process parameters or product characteristics following a multivariate normal distribution or approximately multivariate normal which increases the accuracy of control charts for their applications.
The guidance in ISO 7870‑7 enables implementation of multivariate control charts in process control and optimization of process stability and performance.
ISO 7870-7