BS EN ISO 14644-10:2013

Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration

Published:

30 Apr 2013

•

Withdrawn:

13 Jul 2022

1 Scope

This part of ISO 14644 defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). This part of ISO 14644 is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environment, tools, equipment and devices.

NOTE 1 For the purpose of this part of ISO 14644, consideration is only given to the chemical characteristics of a particle. The physical properties of the particle are not considered and this part of ISO 14644 does not cover the interaction between the contamination and the surface.

NOTE 2 This part of ISO 14644 does not include the contamination generation process and any time-dependent influences (deposition, sedimentation, ageing, etc.) or process-dependent activities such as transportation and handling. Neither does it include guidance on statistical quality control techniques to ensure compliance.

Product Details

Descriptors

Concentration (chemical)

Chemical cleaning

Classification systems

Surfaces

Controlled-atmosphere rooms

Environmental cleanliness

ICS Codes

13.040.35 Cleanrooms and associated controlled environments

Committee

LBI/30

International relationships

Identical to:

EN ISO 14644-10:2013

ISO 14644-10:2013

ISBN

978 0 580 66236 2

Publisher

BSI