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Standard
BS EN ISO 14644-10:2022
Cleanrooms and associated controlled environments - Part 10: Assessment of surface cleanliness for chemical contamination
Current
•
Published:
31 Jul 2022
Overview
Preview
References
History
Product Details
Descriptors
Chemical cleaning
Concentration (chemical)
Surfaces
Environmental cleanliness
Classification systems
Controlled-atmosphere rooms
ICS Codes
13.040.35 Cleanrooms and associated controlled environments
Committee
LBI/30
International relationships
Identical to:
EN ISO 14644-10
ISO 14644-10
ISBN
978 0 539 16126 7
Publisher
BSI