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Standard
Withdrawn
BS EN ISO 14644-9:2012
Cleanrooms and associated controlled environments - Classification of surface cleanliness by particle concentration
Published:
31 Aug 2012
•
Withdrawn:
8 Jul 2022
Overview
Preview
References
History
Product Details
Descriptors
Environmental cleanliness
Contamination
Molecules
Clean rooms
Surfaces
Environment (working)
Chemical analysis and testing
Cleaning equipment
ICS Codes
13.040.35 Cleanrooms and associated controlled environments
Committee
LBI/30
International relationships
Identical to:
EN ISO 14644-9:2012
ISO 14644-9:2012
ISBN
978 0 580 64583 9
Publisher
BSI