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Standard

BS EN ISO 14644-9:2022

Cleanrooms and associated controlled environments - Assessment of surface cleanliness for particle concentration

Current

•

Published:

31 Jul 2022

Overview
Preview
References
History
Product Details
Descriptors
Environmental cleanliness
Contamination
Molecules
Clean rooms
Surfaces
Environment (working)
Chemical analysis and testing
Cleaning equipment
ICS Codes
13.040.35 Cleanrooms and associated controlled environments
Committee
LBI/30
International relationships
Identical to:

ISO 14644-9

EN ISO 14644-9

ISBN
978 0 539 16124 3
Publisher
BSI