BS EN ISO 14644-15:2017

Cleanrooms and associated controlled environments - Assessment of suitability for use of equipment and materials by airborne chemical concentration

Published:

31 Jan 2018

•

Withdrawn:

21 May 2026

1 Scope

This document provides requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments which are linked to the ISO standard for cleanliness classes by chemical concentration (see ISO 14644-8).

The following are outside the scope of this document:

— health and safety requirements;
— compatibility with cleaning agents and techniques;
— cleanability;
— biocontamination;
— specific requirements of equipment and materials for processes and products;
— design details of equipment.

Product Details

Descriptors

Classification systems

Statistical methods of analysis

Conformity

Outliers

Concentration

Samples

Particle size distribution

Algorithms

Clean rooms

Environmental cleanliness

Particulate air pollutants

Sample location

Test equipment

Designations

Sequential sampling

Sampling methods

Mathematical calculations

ICS Codes

13.040.35 Cleanrooms and associated controlled environments

Committee

LBI/30

International relationships

Identical to:

ISO 14644-15:2017

EN ISO 14644-15:2017

ISBN

978 0 580 85502 3

Publisher

BSI