Search BSI Knowledge
Cookie Settings
23/30442762 DC | 5 Jan 2023 | BSI Knowledge
Standard
23/30442762 DC
BS ISO 8181. Atomic Layer Deposition. Terminology
Current
•
Published:
5 Jan 2023
Overview
Preview
References
History
Visit the preview section for more information
Product Details
Descriptors
Atomic energy
Atomic structure
Nanomaterials
Nanoparticles
Inert gases
Exposure time
Vacuum apparatus
Vocabulary
ICS Codes
01.040.25 Manufacturing engineering (Vocabularies)
25.220.01 Surface treatment and coating in general
Committee
STI/33
International relationships
—
ISBN
—
Publisher
BSI