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25/30493761 DC | 7 Jan 2025 | BSI Knowledge
Standard
25/30493761 DC
BS ISO 23131-3 Ellipsometry - Part 3: Transparent single layer model
Current
•
Published:
7 Jan 2025
Overview
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References
History
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Product Details
Descriptors
Monomolecular layers
Thickness
Spectral density
ICS Codes
17.020 Metrology and measurement in general
Committee
STI/33
International relationships
Identical to:
ISO 23131-3
ISBN
—
Publisher
BSI