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25/30495190 DC | 1 May 2025 | BSI Knowledge
Standard
25/30495190 DC
BS ISO 19383 Atomic layer deposition - Chemical characteristics and related process specifications of atomic layer deposition precursors
Current
•
Published:
1 May 2025
Overview
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Product Details
Descriptors
Atomic energy
Layered materials
Chemical elements and inorganic compound
Chemical tests
Specifications
Metal assay
Purity
ICS Codes
25.220.01 Surface treatment and coating in general
Committee
STI/33
International relationships
Identical to:
ISO 19383
ISBN
—
Publisher
BSI