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15/30291643 DC | 3 Mar 2015 | BSI Knowledge
Standard
15/30291643 DC
BS ISO 18516. Surface chemical analysis. Determination of lateral resolution and sharpness in beam based methods
Current
•
Published:
3 Mar 2015
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Product Details
Descriptors
Straight
Auger electron spectroscopy
Surface chemistry
Photoelectron spectroscopy
Electron emission
Resolution
Spectroscopy
Surfaces
Dimensional measurement
Chemical analysis and testing
Side
Electron physics
X-ray photoelectron spectroscopy
ICS Codes
71.040.40 Chemical analysis
Committee
CII/60
International relationships
Identical to:
ISO/DIS 18516
ISBN
—
Publisher
BSI