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26/30568358 DC | 31 Jul 2026 | BSI Knowledge
Standard
26/30568358 DC
BS IEC 62047-63 Semiconductor devices - Micro-electromechanical systems - Part 63: Tensile test method for shape-memory characteristics of MEMS materials under thermomechanical loading
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Published:
31 Jul 2026
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Product Details
Descriptors
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ICS Codes
31.080.99 Other semiconductor devices
Committee
EPL/47
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ISBN
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Publisher
BSI