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24/30497109 DC | 12 Jul 2024 | BSI Knowledge
Standard
24/30497109 DC
BS EN IEC 63068-5 Semiconductor devices. Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices - Part 5. Test method for defects using X-ray topography
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Published:
12 Jul 2024
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Product Details
Descriptors
Semiconductor materials
Semiconductor technology
X-rays
ICS Codes
31.080.01 Semiconductor devices in general
31.080.99 Other semiconductor devices
Committee
EPL/47
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ISBN
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Publisher
BSI