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26/30551904 DC | 3 Jul 2026 | BSI Knowledge
Standard
26/30551904 DC
BS EN IEC 62047-61 Semiconductor devices - Micro-electromechanical systems - Part 61: Evaluation methods of localized deformation and stretchability for Hybrid MEMS materials
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Published:
3 Jul 2026
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Descriptors
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ICS Codes
31.080.01 Semiconductor devices in general
Committee
EPL/47
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ISBN
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Publisher
BSI