Search BSI Knowledge
Cookie Settings
23/30454370 DC | 19 Apr 2023 | BSI Knowledge
Standard
23/30454370 DC
BS EN IEC 62047-46. Semiconductor devices. Micro-electromechanical devices - Part 46. Silicon based MEMS fabrication technology. Measurement method of tensile strength of nanoscale membrane
Current
•
Published:
19 Apr 2023
Overview
Preview
References
History
Visit the preview section for more information
Product Details
Descriptors
Semiconductor technology
Silicon
Measurement
Tensile strength
Membrane switches
Thickness
ICS Codes
31.080.99 Other semiconductor devices
Committee
EPL/47
International relationships
—
ISBN
—
Publisher
BSI