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23/30454366 DC | 20 Apr 2023 | BSI Knowledge
Standard
23/30454366 DC
BS EN IEC 62047-45. Semiconductor devices. Micro-electromechanical devices - Part 45. Silicon based MEMS fabrication technology. Measurement method of impact resistance of nanostructures
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Published:
20 Apr 2023
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Product Details
Descriptors
Semiconductor technology
Semiconductor devices
Electromechanical devices
Silicon
Measurement
Nanotechnology
Structures
ICS Codes
31.080.99 Other semiconductor devices
Committee
EPL/47
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ISBN
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Publisher
BSI