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23/30481371 DC | 13 Oct 2023 | BSI Knowledge
Standard
23/30481371 DC
BS EN IEC 62047-4 Semiconductor devices. Micro-electromechanical devices - Part 4. Generic specification for MEMS
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Published:
13 Oct 2023
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Product Details
Descriptors
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ICS Codes
31.080.99 Other semiconductor devices
Committee
EPL/47
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ISBN
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Publisher
BSI